Then Click Graphs to select the output graphs of the analysis. In the dialogue box which appears, select “C3 Etch Rate” for Response and “C2 Power Level” for Factor by double clicking the columns on the left. To perform the One-way analysis of variance (ANOVA) for stacked data, click Stat Æ ANOVA Æ One Way. Step 2: Performing Data Analysis Example #1 is a one-factor factorial design. Ex: the data for Power Level 160 to 220 are stored in columns C6 through C9 respectively. In unstacked case, the response values of a given treatment are inputted in a separate column. It is a preferred way because it allows arranging data with the corresponding run order (in column C1) so that the independence assumption can be checked in ANOVA analysis. This type of data input is called the stacked case in Minitab. Levels of the treatment / input factorĬorresponding values of the response variable We input the levels of the treatment in one column (C2) and the corresponding values of the response variable in another column (C3). Then you will see the data of the experiment in the worksheet. You may see a pop-up window with message “a copy of the content of this file will be added to the current project.” Click OK. Step 1: Inputting Data Open the Minitab worksheet file by clicking File Æ Open Worksheet, select the file Example_1_Etching_Process.mtw in your stored directory. He is interested in a particular gas (C2F6) and gap (0.80 cm), and wants to test four levels of RF power: 160W, 180W, 200W, and 220W.
An engineer is interested in investigating the relationship between the RF power setting and the etch rate. mpj) - Copy and paste from an Excel spreadsheet.Įxample 1 One-Way ANOVA In many IC manufacturing, a plasma etching process is widely used. How to obtain data? - Manually enter data o Enter column heading above Row 1 o Enter data - Open an existing Minitab worksheet file (.mtw or. The Worksheet is a spreadsheet interface to input, sort, and manipulate data. The Session window displays statistical results of your data analysis and the commands you invoke along with any statistical analyses you may perform. A 30-day free trial version of Minitab 15 can be downloaded at When you launch Minitab, you will see a split screen with two windows: session and worksheet. Introduction to Minitab Minitab is a statistical analysis software package. 29 Example 6B Fractional Factorial Design. 24 Example 6A Fractional Factorial Design. 17 Example 5: Factorial Design without Replication.
14 Example 4: Factorial design with Replications. 9 Example 3: Randomized Complete Block Design. 3 Determining Sample Size in One-way ANOVA. Table of Contents Introduction to Minitab. Minitab Tutorials for Design and Analysis of Experiments
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